High‐resolution scanning ion microscopy
JUL 01, 1982
DOI: 10.1063/1.2915166
Scanning electron microscopes operating in the reflecting mode can resolve surface detail at the level of a few tens of angstroms. A University of Chicago–Hughes Research Laboratories collaboration expects to do about as well with ions by the end of the year. A pair of scanning ion microscopes being built at Hughes (Malibu, California) is designed to achieve a resolving power as fine as 20 Å.
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© 1982 American Institute of Physics
