Nanofabrication

FEB 01, 1990

Building complex semiconductor structures with features as small as 100 atoms across brings quantum effects to life but challenges fabrication technology.

DOI: 10.1063/1.881222

Henry I. Smith

Harold G. Craighead

A decade ago the fabrication and study of electron devices whose smallest features were just under 1 micron in size represented the forefront of the field. Today that forefront has moved down an order of magnitude to 100 nanometers, engendering new terminology based on the prefix nano, from the Greek word for dwarf: “nanoscale devices,” “nanolithography,” “nanofabrication.”

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More about the authors

Henry I. Smith, Massachusetts Institute of Technology, Cambridge.

Harold G. Craighead, Cornell University, Ithaca, New York.