Diffusion pumps
DOI: 10.1063/1.3070959
Over the past ten or fifteen years, modifications of the diffusion pump have doubled its pumping speed reduced backstreaming of pump fluids by four or five orders of magnitude. These improvements result from redesign of some basic pump features and from development of new pump fluids with lower vapor pressures.
References
1. M. H. Hablanian, J. Vac. Sci. and Technol. 6, 265 (1968).https://doi.org/JVSTAL
2. M. H. Hablanian, Proceedings of the Ninth Annual Symposium of the Amer. Vac. Soc., Nov. 1962, Los Angeles.
3. M. H. Hablanian, Transactions of the Vacuum Metallurgy Conference, Amer. Vac. Soc. (1966).
More about the Authors
Barbara Goss Levi. American Institute of Physics.
