Helium atoms probe silicon surface by diffraction
NOV 01, 1978
DOI: 10.1063/1.2994810
Atomic beams are providing a new probe for determining the surface structure of semiconductor crystals. Mark J. Cardillo and Gordon E. Becker of Bell Labs have recently been able to obtain diffraction patterns of thermal–energy helium atoms from the (100) and (111) surfaces of silicon. Their results appear to be the first observation of atom diffraction from an elemental semiconductor.
© 1978. American Institute of Physics
