AVS 2005 Exhibitor Program

A&N Corporation #1808,1810

Manufacturer of high quality vacuum components for 40 years. Our product line includes: flanges and fittings in the following style: ISO-KF(QF); ISO-MF(LF); UHV(CF); ASA; Tri-Seal; vacuum couplings; feedthroughs; vacuum valves (ball, angle, in-line, gate); vacuum line heaters/controllers; traps and special fabrications and chambers.

Accu-Glass Products, Inc. #1821

Designs, engineers, and manufactures a wide range of ultrahigh vacuum subminiature-D electrical feedthroughs with air and UHV compatible connector fitted cable assemblies. The product range includes 9, 15, 25, and 50 pin instrumentation, power, coaxial, and thermocouple-power contact combinations. The product range has been expanded to include: 9-pin circular subminiature-C electrical feedthrough mounted on a MINI CF flange, viewports, bellows sealed rotary feedthroughs, and bellows sealed linear feedthroughs. We maintain a large inventory of standard components for off the shelf delivery. Minor modifications of standard components, and custom engineered products are also available with quick delivery.

Accuvac Technology #1620

An ISO 9001-2000 certified company. We offer a one-stop source for all your conflat® style flanges and welded fittings. We specialize in these product lines and stock all items for quick delivery. Orders are generally shipped within one day of the order receipt. We have been in business over 25 years, and give an unconditional guarantee on everything we sell.

Advanced Energy Industries Inc. #2111

A global leader in process-centered technologies critical to plasma production of semiconductors, flat panel displays, data storage products, CDs, DVDs, architectural glass, and other applications. Our diverse portfolio includes power, flow, thermal, and source technologies. AE operates in regional centers in North America, Asia, and Europe, and offers a global sales and support network.

Advanced Vacuum Company (ADVACO) #1522

Will feature remanufacturing services for all types of vacuum equipment including turbo pumps, dry pumps, mechanical pumps, cryo pumps, diffusion pumps, roots-type blowers, and helium leak detectors. All vacuum pumps rebuilt by ADVACO carry a one-year warranty from the date of installation.

AJA International, Inc. #1904, 1906

Sputtering and E-beam Systems for R&D Pilot Production. Static and Rotating Magnetron Sputter Sources for HV and UHV, Substrate Holders with Rotation, RF Biasing, Heating and Cooling; Sputter Targets, Microwave, RF and DC Power Supplies, Microwave Components and Plasma Sources, RF Ion/Plasma Sources.

Alcatel Vacuum Products, Inc. #2218

Introducing a new brand name for their products, Adixen±. The new product brand name differentiates Alcatel’s vacuum products from their well-known telecommunications products. Alcatel manufactures a complete range of Adixen± brand products including dry vacuum pumps and dry pumping systems, rotary vane pumps, ceramic bearing turbo-molecular pumps, full 5 axis maglev turbo-molecular pumps, molecular drag pumps, vacuum valves, vacuum gauges as well as vacuum flanges/fittings. Alcatel is also the world leader in helium leak detectors.

Altair Technologies, Inc. #2418

Core capabilities- vacuum and hydrogen furnace BRAZING equipment, design/engineering support, clean assembly facility, fully equipped CNC machine shop, state-of-the-art QC/QA lab and, most importantly, quality driven people. Our core strength comes from our understanding of the materials that we join. Couple this to our timely ability to understand and perform to our customer’s requirements, our attractive competitive pricing and we are your perfect partner for your precision furnace BRAZING needs.

Alvatec Alkali Vacuum Technologies GmbH #1720

A specialist in processing alkali and alkali earth metals. Getters and alkali vapor sources—new non-evaporable getters for vacuum-insulated devices, liquid gas storage systems and pipes with ultra high sorption capacity of all relevant residual gases—new chromate free Cesium vapor sources for OLEDs.

American Institute of Physics #2609

Subscribe to Scitation Alerts—weekly e-mails containing the title of every article published in your field, drawn from virtually every journal in the world. Purchase an AIP Article Pack and enjoy prices as low as $2.50 per article. Now access the complete online archive of AIP journals back to Volume 1, Issue 1.

Ametek Process Instruments #2112

The new Dycor Dymaxion Mass Spectrometer offers the latest technology in gas analysis and includes System 2000 software for Windows 95 and NT. Features include ranges from 1-100, 1-200, and 1-300 AMU, a zero drift electrometer amplifier that ensures repeatable data, 32 bit multi-threaded operating software for real time process control, extensive systems integration capability, and Visual basic scripting. Ametek also offers PPT level trace moisture and oxygen analyzers that monitor gas purity.

Angstrom Engineering, Inc. #1516

Has extensive technical expertise in designing unique vacuum solutions to meet your needs. Current PVD product series include the Angstrom CoVap an economical system with powerful process control features, the Åmod providing remarkable configuration flexibility in a compact system, and the Evo-Vac maximizing combined thin film process arrangements.

Angstrom Sciences, Inc. #1719

Supplies high performance Magnetron Sputtering sources and materials for a wide variety of R&D and production applications. Patented designs permit high target utilization and deposition rates with uncompromised film quality. The Angstrom Advantage” designed into our cost effective circular and linear magnetrons make them the industry performance standard.”

Angstrom Sun Technologies, Inc. #1501

Provides the following advanced but cost effective TFProbe series optical instruments for thin film characterization. 1) reflectometer and film thickness measurement system; 2) microspectrophotometer and film thickness measurement system which is uniquely designed for patterned / structured sample characterization such as in MEMS/MOEMS device; 3) spectroscopic ellipsometer system for characterizing thin film thickness and optical properties of materials; 4) digital cameras eyepiece for various microscopes; 5) UV-Vis-NIR spec-trophotometers; 6) advanced analytical service for thin films and materials characterization with nondestructive optical techniques such as spectroscopic ellipsometry, photometry and interferometry.

Applied Surface Technologies #1915

The C02 Snow Jet Cleaning System will be demonstrated. The cleaning process is simple, removing particles of all sizes (to below 0.05m) and also organic residues from surfaces. This cleaning process works well on many substrates, vacuum parts, analytical samples (AFM), optics, and many other applications. The Snow Jet process is, nondestructively, residue-free with no environmental limitations. Bring test samples!

Asylum Research #1918

Manufactures advanced AFMs for nanoscale science. Featured is the MFP-3D with unprecedented precision while maintaining image clarity. The MFP-3D has the lowest noise, and precision and accuracy for closed-loop operation in all three axes; built-in nanolithography; open software with advanced 3D rendering; and capabilities for conductive AFM measurements.

Atlas Technologies #2001

Birmingham Metal, Ltd #1521

A leading ISO 9001/2000 approved international manufacturer/fabricator of precious metal products for the laboratory, and Vacuum, Sputtering Industries. Our products include precious metal labware, wire, sheet, rod, electrodes, targets and evaporation materials. To obtain a quote, email Birmett@aol.com or metgomez@aol.com . or visit our website, www.birminghammetal.com

BOC Edwards #2116

Products and services include vacuum pumps, instrumentation and components for the R&D, scientific instrument, semiconductor, industrial and chemical processing industries. We offer on-line shopping at www.bocedwards.com for a variety of our products and offer a wide range of courses, which are available through our Technical Training Center.

BOC Edwards #1826

Thin Film Deposition Systems

Manufactures world class coating systems for applications in research and development through to full-scale production—particularly in the fields of compound semiconductor, LED and optical components. The range includes the Modular Auto306, Auto500, and TF600 available with resistance, electron beam evaporation sources and planar magnetron sputtering.

Calipso #1617

Calipso launches the AnaLEIS 25 (Low Energy Ion Scattering) surface analysis system: Atomic composition of outer atomic layer: model systems, supported catalysts. Unparalleled sensitivity and accuracy. Conducting and insulating samples; Non-destructive in-depth analysis (0-10 nm) for high-k dielectrics, metal-polymer interfaces. Calipso also provides analytical LEIS services.

Cameca Instruments, Inc. #1622

Capitol Vacuum Parts #1819

Provides a full line of high quality vacuum pump repair parts and kits for Alcatel, Ebara, Edwards, Leybold, Stokes, Welch, Varian and other manufacturers of mechanical and scroll, claw, and lobe pumps and cryopumps. Also offers technical support and turbomolecular pump service. Dedicated to providing you with the right parts, on time, every time.

Center for Tribology, Inc. #1513

CETR is the world largest manufacturer of custom and standard precision nano and micro coating testers for measurements of wear, friction, adhesion, delamination, scratch-resistance, nano and micro hardness, Young’s modulus, fatigue and other mechanical properties of thin films and coatings for biomedical, microelectronics, materials and other industries, as well as basic research.

CeramTec North America #1809

CeramTec North America is the world leader in the design and manufacture of ceramic-to-metal and glass-ceramic hermetically sealed electrical & optical components including: feedthroughs, multipin connectors (Circular & Sub D Type), coaxial connectors, viewports/windows, thermocouples, isolators, baseplate feedthroughs, crystal sensors & assemblies. More than 54 years of experience & an ISO 9001:2000 quality system behind our hermetically sealed components!

Chemfilt lonsputtering #1627

Chemfilt lonsputtering is introducing Sinex 2.0-AS14, the latest High Impact Power Im-pulse Magnetron Sputtering (HIPIMS) power supply. Sinex 2.0-AS14 is a versatile power supply, with 1.4 MW pulsed power, arc-suppression and variable pulse control, dedicated for use with HIPIMS processes which offers next generation process control with highly ionized sputtered materials.

Clark Industries #1520

Clark Industries, Inc., has over 30 years experience in the manufacturing and repair of cryogenic equipment. Our products include: helium transfer lines, fittings, beam line weldments, vacuum chambers, and helium compressor adsorbers. We welcome every opportunity to quote your special designs and specifications. Visit us at www.clarkind.com or via email: sales@clarkind.com

Danfoss #1806

Danfoss is a worldwide leader in developing, manufacturing, and marketing pressure and temperature controls and industrial valves for extreme conditions. Our robust products are equally matched with deep application knowledge and customer support.

DCA Instruments #1619

Designs and manufactures a wide range of UHV deposition systems and components. The products includes MBE, UHV sputtering, PLD and UHV cluster tools. These DCA deposition systems are suitable for deposition of thin films of semiconductors, magnetics, oxides, metals under UHV.

Duniway Stockroom Corp. #2016

Specializes in vacuum equipment and supplies; ion pumps and controls; flanges, gaskets, bolts and nuts; vacuum gauges and controls; mechanical pumps and rebuild kits; supplies (oils, greases, hoses, bell jars) diffusion pumps and leak detectors. Equipment rebuilding services and a variety of reconditioned equipment. Free Catalog. Website: www.duniway.com

Eagle Instrument Services #1515

Repair services for turbomolecular pumps & controllers, mechanical, diffusion, and diaphragm pumps. We offer exchanges of a variety of pumps, and the sale of pre-owned equipment. All equipment includes a one-year new parts warranty. Repair kits for turbo pumps are also available.

Eastern Scientific #1410

EB Sources #1406

Manufactures state of the art EB Equipment. Designed with maintenance in mind. All of our sources are supplied with hi flow water cooling. We have a nice selection of feedthrus for you to choose from. We also manufacture crucibles for Temescal and Telemark. We make coils which can replace Temescal, and the UHV coils for Telemark.

Ebara Technologies, Inc. #1807

A leading global innovator and worldwide supplier of vacuum technologies. Ebara manufactures and services Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement Systems, Degas/Regas/Ozonizer Systems, Vacuum Valves, Vacuum Fittings and Traps, Gas and Exhaust Line Heaters. EBARA maintains a superior Sales and Service network in the U.S. and worldwide.

Elsevier #2614

Evans Analytical Group #1908

A worldwide network of laboratories specializing in state-of-the art surface, bulk and microanalytical services. These services include Dynamic SIMS, TOF-SIMS, XPS, AES, FTIR, SEM/EDS, FIB, TXRF, SPM, RBS, Raman, and GC/MS. Our skilled staff of scientists and analysts has a unique understanding of your materials, and provide rapid turnaround worldwide; all with the mission of helping you solve your most demanding materials problems.

Extrel CMS #1717

Has been building Quadrupole Mass Spectrometers, Gas Analysis Systems, MS/MS equipment and Surface Analysis Systems since 1964. Extrel is known for the high sensitivity and resolution of our instruments, the depth of our application knowledge and our product support.

FEI Beam Technology #2012

Manufactures and sells nanometer resolution, UHV-compatible, liquid metal ion and Schottky field emission electron focusing columns for microscopy, Auger, SIMS, micromachining, and other surface science and semiconductor applications. FEI Beam Technology also manufactures Schottky electron sources, liquid metal ion sources, and control electronics.

FEI Company #1814,1816

FEI’s Tools for Nanotech±, SEM, TEM, and DualBeam± FIB/SEM instruments, enable advanced 3D characterization, metrology, analysis, prototyping, modification and diagnostics on structures at nanoscale dimension for thin films, metals, biomaterials, ceramies, nanotubes, nanoparticles, organic and electronic materials research. New Titan S/TEM delivers sub-Å scale resolution for next generation nano materials research.

FerroTec (USA) Corporation #2008

Fil-Tech, Inc. #1507

Offers savings on the following vacuum systems and AR Coating supplies: Quartz crystals, electron beam gun replacement parts, ion source parts, FT704, FT702, and FT705 diffusion pump fluids, Krytox, FT19, FT20, FT77, FTTW and other mechanical pump fluids, ionization gauge tubes, and thermocouple gauge tubes. NEW: SEM Service available.

Gamma Vacuum #1510

Manufactures Ultra-High Vacuum products including ion, titanium sublimation, and non-evaporable getter pumps. Our staff has over 130 years of combined UHV experience and has applied their knowledge to bring the vacuum community a line of UHV products that excel in performance and value.

Garlock Helicoflex #1403

A leading provider of sealing solutions for complex applications. Products include the Ultraflex low load metal seal, LTS assemblies, Clamp systems and Helicoflex spring energized seals to name a few. Applications include e-beam guns, end point windows, KF flanges, gas delivery systems and chamber inlet/outlet connections.

Geib Refining Corporation #1907

We reclaim gold, silver, platinum, palladium, and iridium from thin film production materials. Scrap residues include chamber scrapings, spent targets, boats, sandblast media, and rejected parts. We also clean shields. We strive to bring you the very best recovery chemically possible combined with one-on-one service.

Geller MicroAnalytical Laboratory, Inc. #2217

Certified to ISO-9000:2000 and 17025, offers products and analytical services to the technical community. Products include NIST and NPL traceable magnification reference standards for atomic force, optical and scanning electron microscopy; and reference materials for surface analysis and microprobe techniques; high vacuum desiccators; and metallographic equipment. Analytical services include Auger electron spectroscopy, XPS, SEM, X-ray, Electron Microprobe, profilometry and metallography.

GENCOA #1805

Presenting their range of magnetron sputter cathodes that are unequalled in variety and performance. Of particular note will be the new design of circular magnetrons with 8 different magnetic configurations. In addition, Speedflo the multi-channel smart reactive gas controller and plasma spectrometer will be available for demonstration. A linear ion source will be displayed with its unique low or high voltage configuration option. Also, don’t forget to collect the new brochure and latest version of the ‘Sputtering on CD’ free resource guide.

Heat Wave Labs Inc. #2505

An engineering, design and manufacturing company that specializes in components and assemblies for the vacuum tube and vacuum equipment industries. Our expertise lies in the areas of thermionic cathodes and ion emitters and guns, Ion Sources and ionizers, Ion pumps and controllers, vacuum tube design, processing and rebuilding, specialized high purity and refractory materials, UHV sample heating and filament products, temperature controllers and power supplies, ceramics and vacuum envelope assemblies and other related products.

Helix Technology Corporation #2311,2315

A global leader in the development and application of innovative vacuum technology solutions. Through CTI-Cryogenics, Granville-Phillips and Polycold, Helix provide a broad range of critical vacuum components, controls and subsystems that are key to the performance of semiconductor, flat panel and disk drive manufacturing equipment.

Hiden Analytical Inc #1708,1710

Manufactures an extensive range of high performance quadrupole mass spectrometers for plasma characterization studies, surface science applications, precision gas analysis and vacuum diagnostics. The Hiden Analytical exhibit will showcase the QIC-20, our fast response, capillary inlet system for process gas analysis, catalysis studies, combinatorial chemistry and reaction kinetics.

HORIBASTEC #1825

Provides instruments for process control, measurement, and analysis for production and R&D systems. Products include gas and liquid mass flow controllers, liquid source delivery systems, residual gas analyzers, capacitance manometers, and DIW concentration monitors.

Horiba Jobin Yvon #1825

Hettinger Electronic Inc. #2219

Manufactures a broad range of power supplies for a variety of vacuum sputtering, etching and induction heating applications. Outputs range from 300W up to 300kW at frequencies from DC to 27.12MHz.

Huntington Labs #1903

Offering a large selection of vacuum valves, feedthroughs, manipulators, fittings, flanges and roughing components. The newly designed modular positioning devices offer flexibility in choosing between manual, pneumatic and motorized applications. Custom designed chambers, manifolds, crosses and tees are supported by 35 years of experience in the vacuum industry. Customers take full advantage of in-house electropolishing, a clean room for assembly and testing and a CMM (Coordinate Measuring Machine) to document and support measurements and specifications.

HVALLC #1714

A leading manufacturer of High/UHV vacuum valves will feature the new bellows sealed pendulum valve along with the patented design throttle valve/controller, shielded gate valve, rectangular/slot valves available in all sizes from MESC 200-300mm openings to 1321mm and larger.

Hysitron, Inc. #2617

As a world leader in nanomechanical testing, Hysitron is solely dedicated to the development of testing solutions for nanoscale mechanical characterization. Hysitron’s high-speed in-situ SPM imaging and new nanoDMA II7 provide superior profiling of thin films. An array of testing techniques provides custom solutions for any application.

Inland Vacuum Industries, Inc. #1618

Manufactures and distributes a complete line of vacuum fluids and greases for mechanical and diffusion pumps. Services include custom distillation of fluids and a reclamation service for used fluids. Recently achieved NSF and USDA approval for Food Grade Lubricants. Product information can be found on our website located at www.inlandvacuum.com .

Innovative Vacuum Solutions, Inc. #2004, 2006

A progressive service company providing a one-stop source for all of your vacuum equipment needs. Offering new and remanufactured pumps, maintenance contracts, leak detection, exchange programs, and other ancillary products. At IVS, you will find a fresh new approach with unmatched quality, service, and value.

InstruTech #1822

Featuring microprocessor based vacuum gauge instrumentation, utilizing the most recent advances in vacuum gauge sensor design and electronics. Products offered range from stand alone vacuum gauge sensors to complete modules and controllers, providing optimal solutions for your needs including built-in or remote displays with single or multi-output options.

ION-TOFUSAI #1612,1614

A leading European manufacturer of Time-of.-Flight Secondary Ion Mass Spectrometers (TOF-SIMS). Our latest instrument, the TOF.SIMS 5, provides detailed elemental and molecular information about surface, thin layers, interfaces of the sample, and gives full three-dimensional analysis. Its unique design guarantees optimum performance in all fields of SIMS applications.

Insulator Seal #2017,2019

Established a global reputation for providing high reliability product and prompt delivery of UHV-grade electrical feedthroughs and optical viewports for Ceramic-Metal seal applications including Semiconductor Equipment, Analytical Instrumentation, UHV devices, and commercial and institutional research facilities. Product lines include Multi-pin, Low/high current power, Coaxial, liquid, Thermocouple & RF Feedthroughs, Optical viewports and Vacuum breaks & envelopes. ISI is an ISO 9001:2000 registered company.

J.A. Woollam Co. #1421

Spectroscopic ellipsometers for thin film characterization: multi-layer thicknesses, optical constants (n and k), in situ process monitoring and control, and more. New instruments extend the wavelength range to both vacuum ultraviolet and infrared (142nm to 33 microns). Offer both research-grade and high-speed metrology tools for process monitoring.

Janis Research Company, Inc. #1509

Recipient of NASA achievement awards (1996&2000), R&D-100 award (1998), offers a complete line of standard and customized cryogenic systems. These include dilution refrigerators (10mK), ADRs (50mK), He-3 & He-4 superconducting magnet systems (0.3K&6-17T), cryocoolers (3KB800K), VT cryostats (2KB800K), noble gas cold traps, micromanipulated probe stations, and more.

JEOLUSA, Inc. #2216

Featuring a full line of surface analysis instrumentation including UHV-STM’s featuring a high temperature sample heating stage, scanning Auger Microprobes with ESCA attachments and ultra high resolution, low voltage, field emission SEM’s and UHV SEM’s.

Johnsen Ultravac, Inc. #2319

Manufactures a complete line of standard and custom designed products for R&D and production applications including 6-axis manipulators, linear translators with 72inch Z-motion, −11 Torr vacuum chambers, Beam-line components and monochromators for Light Sources, cryogenic systems, Black-bodies, Benchcoolers for Aerospace industry; Plasma Spray and other deposition systems for Semiconductor, Nano and Photonics industry.

Key High Vacuum Products Inc. #2117

New / Expanded 2005 Catalog. Manufacturers of Stainless Steel, Aluminum and Brass high vacuum equipment and components. We feature a complete product line building block components including valves, traps, NW-ISO & UHV flanges, pumping systems and custom manifolds and chambers. Aluminum components, innovative valves and DF Series Diffusers.

Kimball Physics, Inc. #16071609

UHV Electron Guns and Ion Guns: Energies 1eV to 100keV. Applications: Surface, Vacuum, Space, and Plasma Physics, Neutralization, Cathodoluminescence, Semiconductor processing, PEL, RHEED, ESD, Custom. Features: Modular optics, Compact fiber-optic control, LabView, RS-232, RS-422, Energy sweeping, Rastering, Pulsing, Feedback stabilization. Components: Multi-CF Fittings, Compact vacuum chambers, eV Parts, Cathodes, Faraday cups.

KLA-Tencor Corporation #1615

KLA-Tencor’s Nanopics 2100 combines the ease-of-use and speed of a surface profiler with the nanometer-scale 3D imaging capabilities of an atomic force microscope, meeting the needs of the emerging fields of nanoscience and nanotechnology for dependable, easy-to-use atomic force profilometers. This clean practical system can quickly generate an 800 micron image of an entire microfabricated device—followed by a 0.5 micron close-up of any one of its surfaces.

Kratos Analytical Inc. #1604

Will exhibit its line of high performance XPS multi-technique spectrometers designed for R&D applications. The AXIS Ultra provides the latest in spectroscopic and imaging capabilities with analytical flexibility. Also being exhibited is the AXIS Nova, an automated XPS instrument combining research level performance with automation and high throughput.

k-Space Associates #2118 2120

Since 1992, k-Space Associates, Inc. has been a leading supplier of advanced instrumentation and software for the surface science and thin-film technology industry. Our product line utilizes patented optical imaging technology for determining real time thin-film stress, wafer curvature, deposition rate, and wafer temperature, as well as full analytical RHEED systems with advanced process control. kSA products are currently in use at hundreds of today’s leading R&D laboratories and the most advanced silicon wafer fabrication facilities worldwide. Extensive input and close collaboration with our worldwide customer base has lead to the development of today’s most powerful thin film characterization products.

Kurt J. Lesker Company #2206

Manufacturer/distributor of standard and custom vacuum systems and components. Manufacturing capabilities include: vacuum chambers; subassemblies; standard and custom vacuum hardware including a large variety of electrical, instrumentation and thermocouple feedthroughs; and complete deposition systems and deposition components. Stocking distributor of scroll, rotary vane, turbomolecular, diaphragm, roots, and piston-style pumps. Visit www.lesker.com for our complete product offering.

Larson Electronic Glass #1920

Producing state of the art glass-to-metal seals since 1954. Products include: view ports, tubular seals, glass adaptors, bellows to glass seals, and custom designs. Larson products are used in high and ultra-high vacuum systems throughout the world.

Leybold Vacuum USA #1417

LK Technologies #1722

Exhibiting the new MINICMA(TM)for Auger and electron energy analysis with moveable double-pass analyzer on 2.75 in. flange. High Resolution Electron Energy Loss Spectrometers (HREELS) at 1 meV resolution including new TOF analyzer. Models RVL2000 for reverse-view LEED/AES. Also exhibiting our versatile ion guns and electron guns.

Mantis Deposition #1514

Dedicated to the manufacture of high-quality deposition components and systems for cutting-edge applications. Our product offerings include nanocluster deposition sources and systems, RF atom and RF ion sources, e-beam evaporators, k-cells and thermal gas crackers. We can also supply custom systems incorporating our deposition components.

Mass-Vac #1626

Will exhibit a full line of vacuum pump inlet traps, oil mist eliminators, and a oil filtration system. Technical data sheet will be available on each product and a complete description of the vacuum pump rebuilding services offered.

MaTeckGmbH #2212

Produces High-Tech-Materials for research and development: metal single crystals of pure elements and alloys with high quality polished surfaces; substrates and wafers (semi conductors, oxide single crystals and bi crystals); sputter-targets, rods, wires, foils, etc. of high purity elements and alloys. Take MaTecK’s Periodic Table of the Elements for free at our booth.

Maxtek, Inc. #2613 2615

Manufacturers of innovative vacuum products including: Deposition Monitors & Controllers, Crystals, Pocket Indexers, Sensor heads, Feedthroughs, Oscillators and Piezoelectric Valves. We are proud to introduce our new low cost MDC-260 controller and VPLO-6 oscillator giving longer crystal life and improved reliability to your crystals. MAXTEK, making measurement crystal clear.

McAllister Technical Services #1504

Exhibiting UHV Kelvin-Probe, plus full range of standard and custom UHV devices such as bellows-sealed positioners, XYZ manipulators, quick-entry load lock system, sample heating/cooling and transfer devices, linear motion feedthroughs, PLD sample & target manipulator, differentially-pumped rotary platform, e-beam evaporator and many accessories.

MDC Vacuum Products/Insulator Seal #2017,2019

Stocks thousands of off-the-shelf components and provides the widest product range of high and ultrahigh vacuum components in the industry. The MDC product line detailed on our technically based website, as well as in our new 528-page catalog consists of flanges, fittings, valves, roughing hardware, vacuum gauge tubes, glass sapphire and quartz viewports, electrical and fluid feedthroughs, motion and manipulation instruments, thin film electron-beam evaporation systems, and surface science chambers. MDC is an ISO 9001:2000 registered company.

MeiVac Inc. #1430

For 30 years MeiVac has supported Electronic, Storage, Optical, Decorative, Industrial, Academic & Government markets with Standard and Custom systems. Cryo-cooled Water Pumping Throttle Valves will be on display. In addition we will provide the latest information on Cluster and Dielectric deposition tools for the Magnetic Storage and Semiconductor industries.

Metal Flex Welded Bellows #2102

Displayed, will be various samples of manufactured bellows assemblies from a multitude of applications. Very simplistic bellows with flat “stamped” ends, to more complete bellows with tube adaptors and Conflat type flanges, to complex assemblies with many parts, shall be available for inspection.

Midwest Tungsten Service #1517

Supplies a full range of tungsten, molybdenum-num and tantalum products including electron and ion beam filaments, evaporative boat sources, plasma sources, machined parts and wire, sheet and rod. We manufacture evaporation materials, supply Dow Corning diffusion pump fluid, and recycle tungsten, molybdenum and tantalum scrap.

MKS Instruments #17041706

A global provider of instruments, components and subsystems for measuring, controlling, powering and monitoring of critical parameters in vacuum-based manufacturing environments. Products include pressure and vacuum measuring gauges; pressure control valves; vacuum components and valves; mass flow controllers; gas analysis instruments; portable helium leak detectors; RF/microwave/DC plasma generators; digital control network devices; and portable calibration systems.

Molecular Imaging #1503

Manufactures Atomic Force Microscopes for nanoscale quantitative force measurements and high resolution imaging with special emphasis on controlled conditions including operation in solvents, acids, specialty gases and temperatures from −30 to +250C. Single molecule microscopy, live cell imaging, nanoscale lithography and nanomanipulation are current applications supported.

Nanonics Imaging Ltd. #2317

Ultimate resolution AFM/NSOM/SPM systems including the first two probe SPM system. Hallmarked by transparent integration with optical and electron/ion beam systems including microRaman, confocal, SEM’s, TEM’s, FIB’s 10 K operation. Optically transparent AFM probes surpassing nanotube profiling/deep trench capabilities, multiwire electrical, Nanoheater± thermal conductivity, electrochemical, AFM controlled gas & liquid nanochemical deposition.

NANOSENSORS #1917

Specializing in the development and production of innovative high quality probes for scanning probe microscopy and atomic force microscopy (AFM). NANOSENSORS new Q30K-Plus and other high quality probes fit to all commercially available AFMs and are designed for highest resolution and outstanding durability. NANOSENSORS is a trademark of NanoWorld AG.

Nanotech-America #1725

Atomic force microscopy is the instrument of choice for nanotechnology and surface analysis. Learn how our systems can help you with surface analysis, nanomanipulation, lithography, electrical and magnetic characterization, single molecule Raman spectroscopy … all on the nanoscale. Our AFMs grow as your lab grows.

National Nanotechnology Infrastructure Network #1518

Niles Electronics #1404

Specializes in Switching Power Supplies and Sweeps for E-Beam Gun Vacuum Coating. We built the world’s first E-Beam Gun Solid-State Switching Power Supply in 1990, and we have been the leading manufacturer in the market since. Our product lineup includes switching power supplies from 4 kW/1 gun to 15 kW/3 guns; conventional analog sweep; and programmable sweeps. Distributed worldwide under both our own and OEM labels, Niles Electronics’ products are synonymous with reliability and technological innovations

Nonsequitur Technologies #1820

Specialists in the design and manufacture of ion and electron optical equipment. Products include ion sources (inert gas, alkali metal, evaporative metal) and high resolution optical columns. Also available are beam diagnostic samples, faraday cups and beam profile measuring software. For OEM customers we manufacture electron guns and sources.

Nor-Cal Products, Inc. #2606

Manufacturer of high vacuum components since 1962. Standard components: flanges, fittings, viewports, feedthroughs and flex-hose; isolation and pressure control valves; thermal products; molecular sieve, particulate and cold traps; thin film components; pressure gauges and manipulators. Custom components: chambers, traps, manifolds, collars and baseplates from customer specifications. 3D Model Library available on-line.

OCI Vacuum MicroEngineering #1426

Manufacturer of rear—view LEED-Auger (AES) spectrometers providing nanoscale measurement of the surface periodic structures as well as quantitative elemental analysis using fine electron probe and CMA compact analyzer. The spectrometer line is offered in several configurations including mounting flange size (8 @ CF,6 @ CFand4.5 @CF), electron probe current and beam size ranges (from micro-amps to fempto-amps), different detectors (basic hemispherical luminescent, micro-channel plates and pulsed with delay-line), and high energy resolution grids. In addition, the ion sputtering guns, custom electron guns, ion sources, analyzers and electron gun for inverse-photoemissionsion with energy selector are offered. The units are controlled by dedicated electronics and software featuring simple analog or fully digital convenient control with on-board microprocessor with USB computer interface.

Omicron NanoTechnology USA #2003

Omicron Nanotechnology continues its tradition of excellence in innovation with the presentation of the most powerful instrumentation yet for the nanoscience research “toolbox”. At this year’s meeting we will be providing live demonstrations of the newest addition to our award-winning line of scanning probe microscopes—the MATRIX control system. Comprised of an all digital electronics package and new data collection and analysis software, the MATRIX system is the cumulative result of several man years of development from the teams at Omicron. Along with the newest results coming from our existing NanoSAM, Nanoprobe and NanoESCA systems, Omicron continues to demonstrate its commitment to providing the finest in high performance, high resolution technology for research in the quickly growing area of nanoscale science and engineering.

Omley Industries, Inc. #2515

Specializes in a wide variety of vacuum brazed components including specialty hermetic feedthroughs and stand-offs; sapphire, diamond and beryllium windows; optical and infrared probes. Omley focuses exclusively on prototype and OEM production vacuum brazing. We braze specifically for your designs and applications. Limited quantities are no problem.

Osaka Vacuum USA, Inc. #2518

Osaka field-proven TG-M & TG-F Compound Turbomolecular Pump series feature maintenance-free, reliable and affordable high vacuum pumping for all applications ranging from semiconductor processing to UHV evacuation. Effective speed: 50 L/S to 3,400 L/S. Standard with high throughput/corrosive compatibility. Full service center and global support available.

Oxford Applied Research #1621

Manufacturer of growth, processing, and characterization equipment for semiconductor or thin film research. Products include RF atom sources for high quality oxide/nitride growth, a full range of RF and DC broad-beam ion sources for sputter-deposition or ion-beam assisted deposition, mini e-beam evaporators, nanocluster deposition sources and thermal gas crackers.

Pascal Technologies Inc. #1506

Manufacturer’s representative and distributor for vacuum systems, cryopumps, chillers, ion pumps, ion pump controllers, gate valves, turbo pumps, helium leak detectors and vacuum hardware.

Pfeiffer Vacuum #2103,2105

Featuring a complete line of turbopumps including TPH 2301- for high gas loads; TPH 1201- workhorse for 1200 l/s pumping; XtraDry± particle-free dry pump; On-Tool Booster pump; magnetic coupled rotary vane pumps-eliminates oil leaks; SmartTest± leak detectors; HiQuad mass spectrometer; Prisma± RGA’s and analog gauges.

PHPK Technologies #2616,2618

CVI Torr Master7 Cryopumps from 8 inch to 48 inch diameter are manufactured and serviced by PHPK. We also specialize in the design and manufacture of vacuum chambers, pressure vessels, cryostats, cold boxes, compressor skids, thermal shrouds, and other major engineered turnkey systems. PHPK produces standard components for the vacuum and cryogenic industries, including VJ piping, cryogenic globe valves, bayonets, vacuum seal-off valves, and numerous other products and equipment suitable for the transport and control of cryogenic fluids through the 4K range.

Physical Electronics USA #2104

A leader in surface analysis instrumentation, Physical Electronics and ULVAC-PHI manufacture instruments that are used to develop and characterize advanced materials systems. Visit our booth to see the latest advances in our product line including: the PHI-700 Scanning Auger Nanoprobe, the TRIFT Time-of-Flight SIMS, the ADEPT-1010 Quadrupole SIMS, and the Quantera Scanning X-ray Microprobe.

Physics Today Exhibitor’s Lounge

Physics Today is the number one publication for the physical sciences, with 120,000 paid readers, including an international readership of 30,000. Physics Today reaches scientists, engineers, and executives working in the $130 billion physics market. www.physicstoday.org

Process Materials Inc. #1726

High purity; sputtering targets and evaporation materials. Bonding services, backing plates and plasma spraying. Products include metals, alloys, and ceramics. A leading source known for quality, consistency and dependability. Exact specifications, delivered on time. Equipment; Remanufactured or upgraded vacuum deposition systems for evaporation and sputtering, including PLC automation. Systems include installation, training and one-year warranty

PVD Products Inc. #1500

Q-Sense, Inc. #2020

Offers a new sensor technology; Quartz Crystal Microbalance with Dissipation monitoring (QCM-D), an in situ, real time technology for the study of mass and viscoelastic changes at the liquid/solid interface or in thin films. Applications include DNA hybridization, several aspects of protein/lipid/cell/bacterial adsorption/adhesion, drug delivery, biosensor, and biomaterials.

Quesant Instrument Corp #2119

Manufactures two types of scanning probe microscopes: 1. QScopes—Large sample capable AFMs with various levels of sample handling automation. 2. Universal SPM—Small sample AFMs and STMs capable of atomic resolution. Both can be operated by the same computer/controller.

R&D Magazine #2805

R.D. Mathis Company #1909

We specialize in the manufacture of hi-vacuum evaporation sources and have been supporting the thin film and metalizing industries since 1963. We offer a comprehensive selection of tungsten, molybdenum and tantalum sources through our catalog as well as custom fabrication to meet your specific coating needs. On display will be a variety of tungsten metalizing filaments, baffled box sources, boats, crucibles and crucible heaters along with other sources that are commonly used to create thin film coatings.

RBD Enterprises #2101

A provider of equipment and services to the surface analysis community. RBD repairs, upgrades, and resells, previous generation Physical Electronics (PHI, Perkin-Elmer) surface analysis systems and components. RBD also provides Auger and XPS analytical services through our Surface Analysis Lab.

Restek Corporation #2506

Silcosteel7-UHV surface treatment dramatically reduces outgassing of contaminants from ultra-high-vacuum system components, greatly reducing pumping system requirements and pump-down times. A Silcosteel7-UHV layer cannot chip, flake, or delaminate from knife-edge or other surfaces. From Restek Performance Coatings Division, the world leader in performance silicon deposition coatings.

RF VII #1414

RHK Technology, Inc. #1711,1713

Develops and manufactures a complete line of SPM equipment for the performance and customization needs of research scientists around the world. We will be displaying a complete line of products including, UHV VT Systems, Cryogenic Temperature Systems, Multi-Probe SPMs with integrated SEM, and our Universal SPM Control System Software.

Rocky Brook Associates, Inc. #2002

A manufacturer of Copper, Titanium and Aluminum Sputtering Targets in a wide range of styles and sizes (purities to 99.999%) will have many examples on display. Both custom and standard designs of direct and internally cooled Backing Plates from our production will also be shown. We service end users, OEMs, bonders, custom target makers and distributors.

SAES Getters USA, Inc. #1613

Will display its world-leading getter solutions supporting various industrial and scientific applications. Exhibit highlights will be: MK5 SORB-AC and CapaciTorr pumps for vacuum systems; WaferGetter pumps for semiconductor process chambers; IntegraTorr sputtered NEG coatings for particle accelerators; getter solutions for MEMS, flat panel displays, cryogenics, lamps and more.

Scientific Systems #1629

A leading designer and manufacturer of sensors and instruments for plasma process control and measurement. The company’s products are used worldwide by plasma research laboratories and plasma based manufacturing industries including the semiconductor and thin film coating industry sectors. Scientific Systems has its headquarters in Dublin, Ireland and has sales and support offices in Europe, the US and Japan. Scientific Systems is part of the Straatum Group. Further information can be obtained from our web site www.scisys.com or by contacting us directly via email at info@scisys.com or via telephone ++353 1 8395122

SCT/Euro Industries #1625

An ISO certified producer of ceramics-to-metal and sapphire-to-metal seals and assemblies. SCT is the world largest provider of hermetic assemblies to a worldwide base of vacuum, medical, nuclear, military and industrial devices OEMs. The entire process, including design, rapid prototyping, small to high volume production, brazing, welding, testing, etc, is located on a single integrated site.

Semicore Equipment, Inc. #1508

Specializes in new, remanufactured, and pre-owned Sputtering, Evaporation & Etching systems for the thin film industry. Semicore has also introduced our own SC line of custom-built systems tailored to your process specifications. Semicore now provides On-line connectivity between your production tool and our factory personnel.

Seren IPS, Inc. #2610

A fast growing company dedicated to the design and manufacture of advanced RF Power delivery systems. Products range from 100 B 5000 watts at frequencies between 100 kHz through 40.68 MHz. Standard features include Pulsing, Frequency Tuning, Voltage Control, Load leveling, Power Ramping, Master/Slave operation. All product=s are CE Marked.

Service Physics Inc. #1718

Showing a modernization package that will extensively renew ESCA instruments manufactured by Surface Science Instruments. A complete upgrade will include ESCA 2005 software, × Ray Source, Charge Compensation, USB interfaced Electronics, Sample Handling and more. A renewed SSI ESCA will provide new functionality, renewed reliability, and will cost less to maintain.

SHI-APD Cryogenics, Inc. #1905

Featuring a wide range of products including 4K & 10K cryocoolers, cryopumps, pulse tubes, shield coolers and laboratory cryostats. Our product offerings feature a number of models and capacities to meet requirements for vacuum applications. For OEM customers, our strength lies in our ability to support our customer base through a worldwide sales and service center network.

Shimadzu Precision Instruments #1818

Shimadzu compound, maglev turbomolecular pumps provide speeds from 190-4,200 L/s(N2). Designed for reliability in HDP etch and CVD processes, they’re also ideal for inspection and metrology applications. The MSE-2000DRY Leak Detector is ideal for clean rooms. The DLC-MR3 system features FCVA(tAC) deposition of sub-3nm protective coatings for HDD sliders/landing pads.

Sierra Applied Sciences #1813,1815

An industry leader in high performance magnetron cathodes for a wide variety of vacuum coating applications. With our superior designs and innovations, we can support any complex deposition applications from decorative to magnetic media. Sierra Applied’s cathodes also offer the highest target utilization available in the industry today, as well as pre-purchase performance and best price guarantees. Simply put, “Sierra Applied” is the only name for all your cathode needs.

Sigma Instruments #1817

Design and manufacture instrumentation for measurement and control of thin film vacuum processes. Our broad cost-effective QCM product line ranges from basic deposition monitors to multi-channel co-deposition controllers, including a co-deposition controller on a PCI card for system OEMs. We also make source indexers, and EIES Electron Impact Emission Spectrometer.

Solid State Technology #2813

SPECS Scientific Instruments, Inc #2605, 2607

A leading manufacturer and distributor of surface analysis and thin film deposition components and systems for 3D Atom-Probe, VT-STM LT-STM, XPS, UPS, ISS, AES, SAM, SEM, LEED, EELS, ARUPS, PEEM, LEEM, SIMS and SNMS, OLED, MBE components, RHEED, effusion cells, K-cells, RF-sources, plasma sources, e-beam evaporators, vacuum chambers and systems.

Staib Instruments, Inc. #2220

Designs/manufactures innovative, high-performance, electron-optical equipment for in-situ material analysis. Electron Guns for surface studies, RHEED to study structure and quality of thin films, Energy spectrometers (Auger, XPS, UPS) for analytical studies. SEM with micro/nano-focus guns, Photo-Electron Emission Microscopes (PEEM), for high time/space resolution studies of chemical distributions, Custom analytical chambers.

Steritool, Inc. #1419

Super Conductor Materials #1803

Serving vacuum technology since the 80’s, we specialize in sputtering targets, evaporation materials for semiconductor, optical, display technology, magnetic media, electronic and allied industries. Materials available from Aluminum to Zirconium, including their alloys and compounds. Also support electron beam evaporation by manufacturing crucible liners in 14 different materials.

Surface Preparation Laboratory #1505

Surface Preparation Laboratory [SPL] enjoys meeting the challenges set by its clients. SPL provides well-prepared and well-characterized crystal surfaces for research. SPL has a well-deserved reputation for being effective and efficient. SPL is capable of meeting the high demands of its clients that include: Sandia Lab., IBM Thomas J. Watson Research Center, Los Alamos, Lawrence Berkeley Lab., Harvard University, Univ. of California, Arizona State Univ., Univ. of Tennessee.

Sycon Instruments, Inc. #1422

A manufacturer of Thin Film Deposition Monitors and Controllers utilizing the quartz crystal sensing techniques. These products include the STC-2002, deposition controller which can be expanded to 8 Channels, STM-1007MF, Thickness Rate Monitor, the STC-2000A, deposition controller for the budget minded. The STM-1 Monitor with integrated oscillator for use with Lab View on your PC. The SRT-422 E-Beam Source Indexer. The T-3000 Deposition Power Supply. The VSO-100 In-Vacuum sensor oscillator and a complete line of sensors, crystals and feedthroughs. All products available for quick delivery all over the world.

Synergy Vacuum, Inc. #1925

Oil-free scroll vacuum pumps—Anest Iwata ISP/DVSL, WELCH Piston and Diaphragm pumps, high-capacity hydrocarbon-free scroll and blower pumping systems. Pumping capacities ranging from .3.2cfm to 125cfm. Single point of contact maintenance services for most roughing and high vacuum pumps. OEM authorized service and OEM parts for Anest Iwata pumps.

Technotrade International, Inc #1716

The Distributor of the Borer Chemie line of precision cleaning chemicals utilized in Hard metal coatings and Optics for cleaning prior to coating. Technotrade is also teamed up with EVATEC NA (formerly Balzers/Unaxis Box Coaters) who sells and services the BAK line of evaporation systems through the US and Canada.

The Fredericks Company #2015

The Televac Division of The Fredericks Company provides a full range of vacuum instruments, gauges and controllers. These run the full gamut of measurement from atmosphere to 10-10 Torr. Additionally, Televac offers the MV2A Thermocouple Controller, an accurate, versatile single-channel vacuum instrument. Televac also features the digital MC300 for multiple vacuum measuring functions.

Thermionics Vacuum Products #1919,1921

Manufactures vacuum components, systems and accessories for production and research applications including: our new line of compact manipulators; our new programmable sweep controller with DeviceNet; our HMS specialized leak detector; our RC series of 3kW e-Guns; HC series e-Guns with dual filament capability for demanding production coating applications; PyraFlat rectangular flanges and waveguides; TriBond bi-metallic flanges and fittings; gate and poppet valves; sample handling and transfer systems; ion pumps; maTChed thermocouple gauges; mechanical, electrical and fluid feedthroughs; and materials and surface science systems.

Thermo Electron Corporation #1912,1916

A range of XPS instruments for all needs including parallel ARXPS for characterization of ultra-thin films, imaging XPS (<3 microns) and entry level XPS. All are multi-technique and upgradeable. High energy resolution scanning Auger spectrometers and a range of analyzers, electron, ion and photon sources are also available.

Transfer Engineering and

Manufacturing, Inc. #1913

Provides innovative products for OEM, production, and R&D customers in semiconductor, media, sputter deposition, and R&D markets. Core expertise is in handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials in HV, UHV, and other controlled environments. Product lines include transfer arms, sample transfer and loadlock systems including MASCOT and TEAM-Mate MESC compatible wafer transport systems and heating and cooling assemblies.

U-C Components Inc #1803

Manufacturer of RediVac8 Vented and Non-Vented Fasteners and RediVac8 Vacuum Baked O-Rings for high vacuum applications now offers fastener lines in exotic materials as well as RediVac8 Slot-Vented Screws. Contact U-C Components now for the latest CD or print catalog or download on-line at www.u-ccomponents.com .

UltraVolt #1413

Regulated High-Voltage Power Supplies; UltraVolt’s catalog covers over 400 models of high-voltage power supplies; Output short circuit & arc protection; TTL enable/disable; Ultra-low ripple available to <3mV; Analog programmable & DAC ready; Modular or rack mount available; DC/DC and universal AC input models; Output voltages are available from 0 to 62V through 0 to 40kV at 4 watts through 250 watts.

ULVAC Technologies #1519

Full line of rough and high vacuum pumps of all types and sizes. Heliot series portable helium leak detectors. Energy saving ER Series dry pumps for CVD and etch applications, ACTER series ion pumps for UHV and XHV applications, AxTRAN extreme high vacuum gauge, Malin mini RGA, G-Tran series gauges.

US, Inc. #2018

Manufacturing planar magnetron sputtering sources and high temperature substrate heaters. The mak source is available from 1.3 inch through 6 inch diameters. Our unique design presents the smallest profile possible, with higher deposition rates than any comparable sputter sources available. Our substrate heaters will attain 950c and are UHV and 02 compatible.

Vacuubrand, Inc. #1721

Up and running, compact oil free pumps with outstanding, stable performance / reliability; VARIO, the variable speed pump with an integrated intelligent controller; vacuum gauges, vacuum controllers and a new line of improved, economical rotary vane vacuum pumps. Used for backing/roughing high vacuum systems, for corrosive chemical evaporation and many OEM applications.

Vacuum Generators #1929

Vacuum Instrument Corporation #1409

MS-50 Series Console and MS-60 Series of Portable Leak Detectors in wet, dry, dual-port, and high sensitivity models. Introducing the new MS-60 Series of wet and dry-pumped Portable Leak Detectors—all of the past-proven benefits of the VIC portable plus improved helium pumping speed, faster roughing, 3 auto-zero modes, and password security have been designed in.

Vacuum Process Engineering #2718

Vacuum Process Technology #1927

Manufactures precision optical coating systems for a wide range of optical as well as decorative and functional applications. An industry leader in physical vapor deposition systems using ion beam, sputtering, electron beam, and plasma assisted thin film deposition technologies. VPT’s applications laboratory is available for development and verification of coating processes.

Vacuum Research Ltd. #2211,2215

The Vacuum Research Throttlemaster Valve provides leak tight shut off and conductance modulation in a single valve. Conductance values can be as low as a few Torr-l/sec. depending on the size of the valve. Available in sizes from NW-50 to ISO 400 or ANSI 2 inch to 16 inch. Positioner is included for local control via 3 digit push button or control the Throttlemaster remotely from your PLC. Cost for ISO-100 with Positioner is $3,495.

Varian, Inc. #1603,1605

A world leader in providing total vacuum solutions. Product offerings include primary, high and ultra-high vacuum pumps, leak detectors, vacuum valves, and gauging for all applications. Varian offers unique expertise in applications, support, and system design to integrate these superior components into optimized vacuum solutions.

VAT #2011

A worldwide leader in the development & manufacturing of quality vacuum valves. Products include: gate, angle, fast-closing, throttle, pressure control, retro fit, and customized valves for applications such as pump isolation, load locks, beam lines, and other vacuum applications. Our company profile and product line brochure is available upon request.

Veeco Instruments #1804

A worldwide leader in metrology tools and process equipment will exhibit Digital Instruments Atomic Force/Scanning Probe Microscopes and Veeco Surface profilers. Ion beam sources and systems for applications ranging from precision optics to large area coating will also be shown.