More on microfabrication

OCT 01, 1980

DOI: 10.1063/1.2913807

A. Wagner

B. E. Fischer

R. Spohr

This article is only available in PDF format

More about the Authors

A. Wagner. Bell Laboratories, Murray Hill, New Jersey.

B. E. Fischer. GSI, Darmstadt, West Germany.

R. Spohr. GSI, Darmstadt, West Germany.

This Content Appeared In

Volume 33, Number 10

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