More on microfabrication
OCT 01, 1980
DOI: 10.1063/1.2913807
This article is only available in PDF format
More about the Authors
A. Wagner. Bell Laboratories, Murray Hill, New Jersey.
B. E. Fischer. GSI, Darmstadt, West Germany.
R. Spohr. GSI, Darmstadt, West Germany.
© 1980 American Institute of Physics
