Microfabrication

APR 01, 1980

DOI: 10.1063/1.2914010

R. Spohr

B. E. Fischer

Alec N. Broers

This article is only available in PDF format

More about the Authors

R. Spohr. GSI, Dermstadt, West Germany.

B. E. Fischer. GSI, Dermstadt, West Germany.

Alec N. Broers. IBM, Yorktown Heights, New York.

This Content Appeared In

Volume 33, Number 4

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